Optical Microscopy Beyond the Diffraction Limit: Imaging Guided and Propagating Fields
نویسندگان
چکیده
Diffraction limits standard optical microscopy to a spatial resolution of about half the wavelength of light. We present novel microscopy techniques for imaging semiconductor materials and devices at better than diffraction-limited spatial resolution and observe previously inaccessible phenomena. We discuss the methods and results for Numerical Aperture Increasing Lens (NAIL) and Near-field Scanning Optical Microscopy (NSOM) techniques.
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تاریخ انتشار 2001